Analysis of the change in the composition of the CdTe surface upon implantation of O₂⁺ ions and subsequent annealing

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Abstract

The methods of implantation of O₂⁺ ions into a single-crystal CdTe/Mo(111) film followed by annealing at Т = 800 K for 30 min resulted in the obtained CdTeO3 film. It has been established that in the valence band of the CdTeO3 film there is a 3rd maximum due to the excitation of electrons from 5s Cd electrons and 2p O electrons and bending 5s Cd + 2pO electrons. At implantation of O₂⁺ ions with E0 ≥ 10 keV, Cd-Te-O type compounds were formed in the near-surface layer; therefore, a three-layer nanosystem of the CdTe/CdTeO/CdTe type was formed.

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About the authors

A. A. Abduvaitov

Islam Karimov Tashkent State Technical University

Email: ftmet@mail.ru
Uzbekistan, Tashkent, 100095

Kh. Kh. Boltaev

Islam Karimov Tashkent State Technical University

Email: ftmet@mail.ru
Uzbekistan, Tashkent, 100095

B. E. Umirzakov

Islam Karimov Tashkent State Technical University

Email: ftmet@mail.ru
Uzbekistan, Tashkent, 100095

D. A. Tashmukhamedova

Islam Karimov Tashkent State Technical University

Author for correspondence.
Email: ftmet@mail.ru
Uzbekistan, Tashkent, 100095

G. Abdurakhmanov

Mirzo Ulugbek National University of Uzbekistan

Email: ftmet@mail.ru
Uzbekistan, Tashkent, 100174

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Supplementary files

Supplementary Files
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1. JATS XML
2. Fig. 1. AFM image of the CdTe film surface.

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3. Fig. 2. X-ray phase analysis of CdTe (111).

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4. Fig. 3. Auger spectra: 1 – pure CdTe (111); 2 – CdTe (111) implanted with ions with E₀ = 1 keV at D = 8∙1016 cm⁻²

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5. Fig. 4. Profile of the distribution of O atoms by depth in the CdTeO₃/CdTe(111) system.

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6. Fig. 5. Photoelectron spectra for: 1 – CdTe (111); 2 – CdTe (111) with CdTeO₃ film.

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7. Fig. 6. Dependence of the surface concentration of Cd, Te and O atoms on the irradiation dose for CdTe implanted with ions with E₀ = 15 keV.

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8. Fig. 7. Concentration profiles of the distribution of O atoms by depth for CdTe implanted with ions with E₀ = 15 keV at a dose of D = 10¹⁷ cm⁻²: 1 – before heating; 2 – after heating at T = 800 K.

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